Emission SourcesMitigation OptionsRelevant LinksSemiconductor manufacturers use a variety of high GWP gases to create intricate circuitry patterns upon silicon wafers and to rapidly clean chemical vapor deposition (CVD) tool chambers. Semiconductor manufacturing processes use high GWP fluorinated compounds including perfluorocarbons (e.g., CF4, C2F6 and C3F8), hydrofluorocarbons (CHF3, CH3F and CH2F2), nitrogen trifluoride (NF3) and sulfur hexafluoride (SF6). Semiconductor manufacturing processes also use fluorinated heat transfer fluids an…See more on epa.govCFR - Code of Federal Regulations Title 21
[email protected]Sulfur Hexafluoride (SF6) is an inorganic, colorless, odorless, non-flammable, extremely potent greenhouse gas, and an excellent electrical insulator. SF6 has an octahedral geometry, consisting of six fluorine atoms attached to a central sulfur atom. It is a hypervalent molecule.Buy Sulphur Hexafluoride Gas Cylinders Online | BOC UK ...
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