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Micafluid IR SF6 process

Micafluid IR SF6 process

The fluorine plasma is the main component that performs the etching process. Since it is listed as a toxic gas under COSHH regulations, it is imperative that companies using SF 6, as part of the process, monitor for any leaks or accidental release. New SF6 Gas Detection SolutionsThe pyrolysis and subsequent oxidation of SF6 - ScienceDirect

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