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synecom SF6 decomposition process

synecom SF6 decomposition process

Dec 02, 2019This paper thoroughly investigates the decomposition pathways of SF 6 in the presence of organic insulator vapors by means of high level quantum chemistry calculations with density functional theory. Optimized molecular structures and vibrational frequencies of intermediate products (IM) and transition states (TS) are first reported in this work.Cited by: 1Publish Year: 2020Author: Yuwei Fu, Xiaohua Wang, Xinxin Wang, Aijun Yang, Mingzhe RongMissing:synecomMust include:synecomCatalytic Decomposition of SF 6 from Semiconductor ...

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